PRODUCT LINE
Applied CMP Tools
Quartz Wafers
GDP/Showerheads
Shadow/Focus Rings

PROPERTIES of QUARTZ
Mechanical
Optical
Thermal
Electrical
Chemical

TECHNOLOGY
Laser Polishing Edge
Production
Quality

SPECIFICATIONS
Mechanical
Material
Opto-Electric
Packaging

OUR COMPANY
Our Business
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PROPERTIES of QUARTZ & SILICA

Electrical

Quartz and Silica are excellent insulators even at elevated temperatures.

Outstanding High Frequency characteristics are making make it suitable substrate
for Ultra High Frequency Microwave circuits.

Electrical Properties
Properties FUSED QUARTZ FUSED SILICA
Electric
Fused
Flame
Fused
Standard Semi Dry Dry Very Dry
Dielectric Constant
25 oC @ 24 Ghz
3.8
3.82
3.8
3.8
3.8
3.8
Dielectric Constant
500 oC @ 60 Ghz
3.8
3.72
3.72
3.72
3.72
3.72
Dielectric Strength
@25oC, kV/cm
34
32
34
36
39
40
Dielectric Strength
@500oC, kV/cm
16
15
16
16
16
17
Loss Tangent
25 oC @ 24 Ghz
1 x 10-4
3 x 10-4
3 x 10-4
3 x 10-4
3 x 10-4
3 x 10-4
Loss Tangent
25 oC @ 60 Ghz
1 x 10-4
7 x 10-4
7 x 10-4
7 x 10-4
7 x 10-4
7 x 10-4