PRODUCT LINE
Applied CMP Tools
Quartz Wafers
GDP/Showerheads
Shadow/Focus Rings

PROPERTIES of QUARTZ
Mechanical
Optical
Thermal
Electrical
Chemical

TECHNOLOGY
Laser Polishing Edge
Production
Quality

SPECIFICATIONS
Mechanical
Material
Opto-Electric
Packaging

OUR COMPANY
Our Business
Contact us
Press room

PROPERTIES of QUARTZ & SILICA

Mechanical

Mechanical properties of Quartz and Silica are similar to other glasses.

High tensile strength and high compressive strength is typical. Note that many properties are temperature dependent and tensile properties are greatly effected by surface flaws.

The table below compiled from information received from the manufacturers of the material.

Mechanical properties

Properties FUSED QUARTZ FUSED SILICA
Electric
Fused
Flame
Fused
Standard
OH>1200ppm
Semi Dry
OH>800ppm
Dry
OH>100ppm
Very Dry
OH>10ppm
Density
@25oC - g/cm3
2.20
2.20
2.20
2.20
2.20
2.20
Hardness
kg/cm2
780.00
780.00
780.00
780.00
780.00
780.00
Compressibility
kg/cm2
11,500.00
11,500.00
11,500.00
11,500.00
11,500.00
11,500.00
Poisons ratio
kg/cm2
0.17
0.17
0.18
0.18
0.18
0.18
Bulk Modulus
@25oC kg/cm2
423,000.00
421,000.00
420,00.00
420,000.00
420,000.00
420,000.00
Shear (Rigidity Modulus @25oC kg/cm2
320,000.00
318,000.00
318,000.00
320,000.00
317,000.00
317,000.00
Elasticity (Young's) Modulus @25oC kg/cm2
744,000.00
744,000.00
744,000.00
744,000.00
744,000.00
744,000.00
Tensile Strength
@25oC kg/cm2
500.00
500.00
500.00
500.00
500.00
500.00
Bending Strength
@25oC kg/cm2
700.00
700.00
700.00
700.00
700.00
700.00
Torsional Strength
@25oC kg/cm2
500.00
300.00
300.00
300.00
300.00
300.00